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| 184 | Robust Femto-Farad Capacitance Extraction Method for High-k MIM Capacitor with Complex Dielectric Materials in DRAM |
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E-MRS 2014 FALL MEETING, Warsaw, Poland / 2014. 09. 15- 2014. 09. 18
Incheol Nam , Daewon Kim, Chan-Wook Baik, Sungwoo hwang, Sangsig Kim
